Industrial equipment

Wafer push-pull force testing equipment

Model: ABT200W

Equipment Overview:

This equipment is suitable for hot-press packaging and die bonding of SiC and other wafers.


Equipment features:

♦︎ Supports silver paste or silver film processes ♦︎ Equipped with both heated and standard pick-and-place heads ♦︎ Heated pick-and-place head temperature up to 300℃, force control up to 300N (500N optional) ♦︎ Features track heating function with two heating platforms: preheating and placement. Temperature is settable, range: RT~300℃ (same for preheating and heating) ♦︎ Includes a standard pick-and-place head, enabling wafer transfer from the standard pick-and-place head to the heated pick-and-place head, reducing heating and cooling time and improving production efficiency ♦︎ Equipped with an intelligent temperature monitoring system that automatically generates pressure and temperature profiles ♦︎ Size range: 2x2mm~20x20mm ♦︎ High UPH: 1K (may fluctuate depending on product process requirements (heating temperature, pressurization time)) ♦︎ Nozzle cleaning mechanism: for cleaning the nozzles ♦︎ Optional nitrogen injection module to prevent product oxidation during heating ♦︎ Equipped with an exhaust system to remove all residual gases from the sintering process (can be connected to the factory ventilation system) ♦︎ Flexible configuration with multiple wafer/material feeding methods, and upgrade and expansion capabilities.


Specifications

Equipment size

Equipment weight

power supply

Compressed air supply

Vacuum supply

System software platform

Shaft specifications







 

XY Platform Itinerary


 

Test mode




 

software

 

WaferLoading

 

Compliance






 

Length 1000mm, width 500mm, height 2000mm (excluding operating light)

1500kg

100/110V or 220/240V AC @10A 50/60Hz

clean dry air Minimum 4 bar,6mm OD/4mm ID plastic pipe

Minimum 60kPa,6mm OD/4mm ID plastic pipe

Windows 10

X/Y axis travel 340*275mm(standard)X/Y axis accuracy ±5 um Full TravelX/Y axis maximum speed 50mm/sX/Yaxis maximum force 10kg(standard)Z axis travel 75mmZ axis accuracy over 2mm ±1 umZ axis maximum speed 15mm/sZ axis maximum force 10kg

340*275mm(standard) Maximum Force:10Kg(standard)300*235mm Maximum Force:10Kg(standard)550*415mm Maximum Force:5Kg(standard)

Semi-automaticFully-automaticHost Control via SECS/GEMWafer map download

ABT2000WSECS/GEM(Please consult factory)

Manual via carrier frameFully automatic via EFEM

European DirectivesMachinery Directive (2006/42/EC)Low Voltage Directive(2006/95/EC)EMC Compatibility (2004/108/EC)RoHS(2002/95/EC)CE Declaration of ConformitySEMI (S2)

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